Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe-Reference-Cited by-同舟云学术

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Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe

Published:2024 Issue: Volume:73 Page:1-9
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Huang Qiangxian¹^ORCID,Xu Jian²^ORCID,Qin Xianzhi²^ORCID,Zhang Liansheng¹^ORCID,Cheng Rongjun¹^ORCID,Li Hongli¹^ORCID,Wang Chaoqun²^ORCID,Li Ruijun¹^ORCID

Affiliation:

1. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, Anhui, China

2. School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, Anhui, China

Funder

National Natural Science Foundation of China

National Key Research and Development Project of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/19/10367905/10478600.pdf?arnumber=10478600

Reference37 articles.

1. Combined frequency modulated atomic force microscopy and scanning tunneling microscopy detection for multi-tip scanning probe microscopy applications

2. High-Efficiency Automated Nanomanipulation With Parallel Imaging/Manipulation Force Microscopy

3. Radio frequency filter for an enhanced resolution of inelastic electron tunneling spectroscopy in a combined scanning tunneling- and atomic force microscope

4. Vision-based force sensing for nanomanipulation

5. Multisensor data processing in dimensional metrology for collaborative measurement of a laser plane sensor combined to a touch probe

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