Optimization of MEMS Thermal Actuators and Microgrippers
Author:
Affiliation:
1. M S Ramaiah Institute of Technology,Dept. of Electronics & Communication,Bengaluru,India
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10498131/10498150/10498665.pdf?arnumber=10498665
Reference18 articles.
1. Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators
2. Modelling of Chevron electrothermal actuator and its performance analysis
3. Modeling and Thermal Metrology of Thermally Isolated MEMS Electrothermal Actuators for Strain Engineering of 2D Materials in Air
4. Design and research on large displacement bidirectional MEMS stage with interlock mechanism
5. A review on actuation and sensing techniques for MEMS-based microgrippers
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