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Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators

  • Published:2016-11-11 Issue:8 Volume:23 Page:3775-3789
  • ISSN:0946-7076
  • Container-title:Microsystem Technologies
  • language:en
  • Short-container-title:Microsyst Technol

Author:

Zhang Zhuo,Yu Yueqing,Liu Xinyu,Zhang XupingORCID

Funder

National Natural Science Foundation of China

China Scholarship Council

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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2. An analytical nonlinear displacement model of electrothermal V-shaped actuator;Vietnam Journal of Mechanics;2024-06-29

3. Nonlinear Displacement of the Electrothermal V-Shaped Actuator;Shock and Vibration;2024-05-02

4. Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors;Journal of Microelectromechanical Systems;2024-04

5. Optimization of MEMS Thermal Actuators and Microgrippers;2024 International Conference on Integrated Circuits and Communication Systems (ICICACS);2024-02-23
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