Automated Void Detection in TSVs from 2D X-Ray Scans using Supervised Learning with 3D X-Ray Scans

Author:

Pahwa Ramanpreet Singh,Gopalakrishnan Saisubramaniam,Su Huang,Ping Ong Ee,Dai Haiwen,Wee David Ho Soon,Qin Ren,Rao Vempati Srinivasa

Funder

Economic Development Board (EDB), Singapore

Agency for Science, Technology and Research (A*STAR)

Publisher

IEEE

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. AI-based 3D Metrology and Defect Detection of HBMs in XRM Scans;World Scientific Annual Review of Artificial Intelligence;2024-01

2. 3D Defect Detection and Metrology of HBMs using Semi-Supervised Deep Learning;2023 IEEE 73rd Electronic Components and Technology Conference (ECTC);2023-05

3. Nondestructive monitoring of annealing and chemical–mechanical planarization behavior using ellipsometry and deep learning;Microsystems & Nanoengineering;2023-04-28

4. On the Use of Component Structural Characteristics for Voxel Segmentation in Semicon 3D Images;ICASSP 2022 - 2022 IEEE International Conference on Acoustics, Speech and Signal Processing (ICASSP);2022-05-23

5. X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits;Engineering Reports;2022-05-12

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