Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field-Reference-Cited by-同舟云学术

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Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field

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Container-title:Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
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Author:

Iwase E.,Takeuchi S.,Shimoyama I.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/7726/21214/00984236.pdf?arnumber=984236

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