Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications-Reference-Cited by-同舟云学术

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Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications

Published:2012-01 Issue: Volume: Page:
ISSN:
Container-title:2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Ollier E.,Dupre C.,Arndt G.,Arcamone J.,Vizioz C.,Duraffourg L.,Sage E.,Koumela A.,Hentz S.,Cibrario G.,Meininger P.,Benotmane K.,Marcoux C.,Rozeau O.,Billiot G.,Colinet E.,Andrieu F.,Philippe J.,Aussenac F.,Mercier D.,Blanc H.,Ernst T.,Robert P.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/6165525/6170071/06170421.pdf?arnumber=6170421

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1. Simplified top-down fabrication of sub-micron silicon nanowires;Semiconductor Science and Technology;2023-11-07

2. Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI;Journal of Micromechanics and Microengineering;2018-02-15

3. Piezoelectric MEMS resonators based on ultrathin epitaxial GaN heterostructures on Si;Journal of Micromechanics and Microengineering;2016-09-09

4. Towards a comprehensive model for a resonant nanoelectromechanical system;Journal of Micromechanics and Microengineering;2015-08-18

5. CMOS–MEMS resonators: From devices to applications;Microelectronic Engineering;2015-01

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