High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding-Reference-Cited by-同舟云学术

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High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding

Published:2013-01 Issue: Volume: Page:
ISSN:
Container-title:2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Cho J.,Yan J.,Gregory J. A.,Eberhart H.,Peterson R. L.,Najafi K.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6471302/6474158/06474206.pdf?arnumber=6474206

Cited by 29 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Manufacturing fused silica hemispherical resonators using polymer glass suspension and replication molding;Journal of Micromechanics and Microengineering;2024-07-09

2. Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice;Micromachines;2022-10-05

3. The formation of microcrystalline defects on the surface of silica glass arising from mechanochemical processing;International Journal of Applied Glass Science;2022-02-24

4. Micro Hemispherical Resonators with Quality Factor of 1.18 Million Fabricated Via Laser Ablation;2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS);2021-01-25

5. Introduction;Cylindrical Vibratory Gyroscope;2021

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