Micro Hemispherical Resonators with Quality Factor of 1.18 Million Fabricated Via Laser Ablation-Reference-Cited by-同舟云学术

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Micro Hemispherical Resonators with Quality Factor of 1.18 Million Fabricated Via Laser Ablation

Published:2021-01-25 Issue: Volume: Page:
ISSN:
Container-title:2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Shi Yan,Lu Kun,Li Bin,Chen Yimo,Xi Xiang,Wu Yulie,Wu Xuezhong,Xiao Dingbang

Funder

Youth Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9375130/9375148/09375376.pdf?arnumber=9375376

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Six million Q factor micro fused silica shell resonator with teeth-like tines released by femtosecond laser-assisted chemical etching;Science China Technological Sciences;2024-04-09

2. Frequency Tuning Method on Teeth-Like Tines of the Fused Silica Micro-Hemispherical Resonator Using Femtosecond Laser;Journal of Microelectromechanical Systems;2024-02

3. Generating Features with Increased Crop-Related Diversity for Few-Shot Object Detection;2023 IEEE/CVF Conference on Computer Vision and Pattern Recognition (CVPR);2023-06

4. Micromachining Fused Silica Micro Shell Resonator with Quartz Glass Mold by Thermal Reflow;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

5. Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice;Micromachines;2022-10-05

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