Exploring the Q-factor limit of temperature compensated CMOS-MEMS resonators
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Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/7041251/7050861/07051093.pdf?arnumber=7051093
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Q-Boosting Of Composite CMOS-MEMS Resonators By AC Current Low-Temperature Annealing;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. A CMOS-MEMS Beam Resonator with Q > 10,000;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
3. A CMOS-MEMS Thermal-Piezoresistive Oscillator for Mass Sensing Applications;IEEE Transactions on Electron Devices;2020-03
4. A CMOS-Integrated MEMS Platform for Frequency Stable Resonators-Part I: Fabrication, Implementation, and Characterization;Journal of Microelectromechanical Systems;2019-10
5. Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator;Microelectronics Reliability;2016-08
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