A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation-Reference-Cited by-同舟云学术

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A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation

Published:2009-08 Issue:4 Volume:18 Page:868-877
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Park J.M.,Evans A.T.,Rasmussen K.,Brosten T.R.,Nellis G.F.,Klein S.A.,Gianchandani Y.B.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/5185350/05067289.pdf?arnumber=5067289

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