Next-Generation Superlubric Microvalves for Flexible Robotics: Enhancing Fluid Control with Zero Leakage, Ultralong Life, and Intrinsic Sensing Capability

Abstract

Valves are critical components in Advanced Fluid Control Systems (AFCS), playing a vital role in applications like soft robotics and medical devices. Traditional mechanical valves usually struggle with issues such as leakage and wear, reducing the efficiency and precision of air-driven systems. This study introduces a superlubricity micro valve (SLMV) that excels in performance and has self-sensing capabilities. The SLMV demonstrated zero helium leakage at pressures over 0.9 MPa and remained defect-free after one million collision and 5000 reciprocating sliding friction testing. Additionally, the valve features self-powered sensing for detecting its open state, enhancing feedback control. The AFCS equipped with SLMVs will significantly enhance the flexibility and functionality of pneumatic flexible robots, and facilitate the development of implantable drug delivery devices that are more durable, compact, safer, and more reliable.