Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors-Reference-Cited by-同舟云学术

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Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors

Published:2017-12 Issue:6 Volume:26 Page:1272-1278
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Kangul Mustafa^ORCID,Aydin Eren,Gokce Furkan,Zorlu Ozge,Kulah Haluk

Funder

TUBITAK

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/8124141/07999184.pdf?arnumber=7999184

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electrical-feed-through elimination in micro-hemisphere resonator measurement based on mixed-frequency-excitation of different harmonic signals;Sensors and Actuators A: Physical;2024-10

2. Analysis and Mitigation of the Feedthrough Capacitance in Weakly Coupled Silicon Resonators;IEEE Sensors Journal;2024-06-01

3. Feedthrough effect in MEMS gyroscopes and fully differential feedthrough cancellation method;Review of Scientific Instruments;2024-01-01

4. Equivalent Circuit Modeling of Air-Coupled Laterally Actuated Electrostatic Bulk-Mode MEMS;IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control;2024

5. Electrical-Feed-Through Elimination in Micro-Hemisphere Resonator Measurement Based on Mixed-Frequency-Excitation of Different Harmonic Signals;2024

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