Design and Fabrication of Reliable Power Efficient Bistable MEMS Switch Using Single Mask Process
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9212656/09146341.pdf?arnumber=9146341
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. MEMS Switch Realities: Addressing Challenges and Pioneering Solutions;Micromachines;2024-04-23
2. Active shaping of a bi-stable potential: Exploring nonlinear coupling to a stiff externally-excited oscillator;Journal of Sound and Vibration;2023-12
3. Design of a Double-Layer Electrothermal MEMS Safety and Arming Device with a Bistable Mechanism;Micromachines;2022-07-07
4. Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations;Micromachines;2022-04-20
5. A high contact force and high‐isolation radio‐frequency microelectromechanical systems switch for radio‐frequency front‐end applications;International Journal of Circuit Theory and Applications;2022-01-20
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