Grating-Assisted Optical Microprobing of In-Plane and Out-of-Plane Displacements of Microelectromechanical Devices-Reference-Cited by-同舟云学术

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Grating-Assisted Optical Microprobing of In-Plane and Out-of-Plane Displacements of Microelectromechanical Devices

Published:2006-04 Issue:2 Volume:15 Page:388-395
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:en
Short-container-title:J. Microelectromech. Syst.

Author:

Zhou G.,Chau F.S.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/33923/01618724.pdf?arnumber=1618724

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review;Micromachines;2024-08-06

2. Review of micromachined optical accelerometers: from mg to sub-μg;Opto-Electronic Advances;2021

3. Optical Fourier transform based in-plane vibration characterization for MEMS comb structure;Optics Express;2013-02-21

4. MEMS Kinematics by Super-Resolution Fluorescence Microscopy;Journal of Microelectromechanical Systems;2013-02

5. Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor;Journal of Nanophotonics;2012-03-29

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