Optical Fourier transform based in-plane vibration characterization for MEMS comb structure
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference10 articles.
1. Comb-drive actuators for large displacements
2. A low-loss, single-pole, four-throw RF MEMS switch driven by a double stop comb drive
3. Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolution
4. In-plane vibration characterization of microelectromechanical systems using acousto-optic modulated partially incoherent stroboscopic imaging
5. Grating-enhanced through-wafer optical microprobe for mic roelectromechanical system high-resolution optical position feedback
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