Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon-Reference-Cited by-同舟云学术

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Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon

Published:2022-08 Issue:4 Volume:31 Page:604-611
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Beaucejour Rossiny¹^ORCID,Roebisch Volker²,Kochhar Abhay³^ORCID,Moe Craig G.³^ORCID,Hodge Michael David³,Olsson Roy H.⁴^ORCID

Affiliation:

1. Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA, USA

2. Evatec AG, Trübbach, Switzerland

3. Akoustis, 9805-A Northcross Center Court, Huntersville, NC, USA

4. Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA

Funder

NSF CAREER Award

The Defense Advanced Research Projects Agency DARPA Small Business Innovation Research SBIR

National Science Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://ieeexplore.ieee.org/ielam/84/9847109/9770129-aam.pdf

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2. Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO3 Thin Film;Micromachines;2024-03-30

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5. Acoustic-Wave-Resonator-Based Bandpass Filters With Multiconfigurable and Continuously Tunable Transfer Function Capabilities;IEEE Transactions on Microwave Theory and Techniques;2024

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