Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation
Author:
Affiliation:
1. Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai, India
2. Department of Mechanical Engineering, Indian Institute of Technology Madras, Chennai, India
Funder
Ministry of Information Technology (MeitY), Government of India
Department of Science and Technology
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9847109/09803816.pdf?arnumber=9803816
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Nonlinear support loss in micro/nano beam resonators induced by geometric nonlinearity;Acta Mechanica Sinica;2024-01-29
2. Enhancement of The Quality Factor of Thin-Film-Piezoelectric-on-Si MEMS Resonator Using Phononic Crystals and Circular Suspended Frame Structure;2023-11-09
3. Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator;Micromachines;2023-10-22
4. Effect of Undercut due to Isotropic Etch while Releasing on the Performance of TPoS Resonators;2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2023-04-17
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