ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes-Reference-Cited by-同舟云学术

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ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes

Published:2017-02 Issue:1 Volume:26 Page:102-112
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Mayrhofer P. M.^ORCID,Rehlendt C.,Fischeneder M.,Kucera M.,Wistrela E.,Bittner A.,Schmid U.

Funder

Austrian Science Fund

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/7839304/07763813.pdf?arnumber=7763813

Cited by 40 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Deposition and structural investigation of uniform AlN(100) films at wafer scale through RF magnetron sputtering;Ceramics International;2024-08

2. Enhancing Power Density through Electrode Configuration for Piezomems Energy Harvester;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

3. Stress effect on the leakage current distribution of ferroelectric Al0.7Sc0.3N across the wafer;Applied Physics Letters;2023-09-25

4. Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materials;Journal of Micromechanics and Microengineering;2023-03-30

5. Dawn of nitride ferroelectric semiconductors: from materials to devices;Semiconductor Science and Technology;2023-03-06

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