Near-Contact Gas Damping and Dynamic Response of High-g MEMS Accelerometer Beams-Reference-Cited by-同舟云学术

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Near-Contact Gas Damping and Dynamic Response of High-g MEMS Accelerometer Beams

Published:2013-10 Issue:5 Volume:22 Page:1089-1099
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Parkos Devon,Raghunathan Nithin,Venkattraman Ayyaswamy,Sanborn Brett,Chen Weinong,Peroulis Dimitrios,Alexeenko Alina

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/6613539/06567896.pdf?arnumber=6567896

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Multiscale modeling of lubrication flows under rarefied gas conditions;Microfluidics and Nanofluidics;2023-09-21

2. Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical systems;Computers & Mathematics with Applications;2022-05

3. Bouncing dynamics of electrostatically actuated NEM switches;Nano Express;2021-12-24

4. Characterizing deviation from equilibrium in direct simulation Monte Carlo simulations;Physics of Fluids;2019-04

5. Nonlinear analysis and characteristics of electrically-coupled microbeams under mechanical shock;Microsystem Technologies;2018-07-21

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