Mechanical Effects of Galvanic Corrosion on Structural Polysilicon-Reference-Cited by-同舟云学术

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Mechanical Effects of Galvanic Corrosion on Structural Polysilicon

Published:2007-02 Issue:1 Volume:16 Page:87-101
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Miller David C.,Hughes William L.,Wang Zhong-Lin,Gall Ken,Stoldt Conrad R.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/4099357/04099373.pdf?arnumber=4099373

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5. Porous Silicon Formation by Galvanic Etching;Handbook of Porous Silicon;2017

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