Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device-Reference-Cited by-同舟云学术

Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device

Author:

Shimofuri Masaki¹^ORCID,Banerjee Amit¹^ORCID,Hirotani Jun¹,Hirai Yoshikazu²^ORCID,Tsuchiya Toshiyuki¹^ORCID

Affiliation:

1. Department of Micro Engineering, Kyoto University, Kyoto, Japan

2. Department of Mechanical Engineering and Science, Kyoto University, Kyoto, Japan

Funder

Japan Society for the Promotion of Science (JSPS) KAKENHI

Yazaki Memorial Foundation for Science and Technology

Mori Manufacturing Research and Technology Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

Reference25 articles.

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