Deep-reactive ion-etched compliant starting zone electrostatic zipping actuators-Reference-Cited by-同舟云学术

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Deep-reactive ion-etched compliant starting zone electrostatic zipping actuators

Published:2005-12 Issue:6 Volume:14 Page:1283-1297
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Jian Li ,Brenner M.P.,Christen T.,Kotilainen M.S.,Lang J.H.,Slocum A.H.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/33032/01549863.pdf?arnumber=1549863

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Modeling and Experiments on Flexible Side-Electrodes Electrostatic Actuators: Influence of the Contact Interface on the Available Force;2024

3. Modeling and Dynamic Design of a Piezoelectric Cantilever Energy Harvester with Surface Constraints;Journal of Vibration Engineering & Technologies;2023-10-20

4. Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces;Journal of Micromechanics and Microengineering;2023-10-18

5. Electrostatically Actuated Thin-Shell Space Structures;AIAA SCITECH 2023 Forum;2023-01-19

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