Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers-Reference-Cited by-同舟云学术

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Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Published:2006-10 Issue:5 Volume:15 Page:1364-1370
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:en
Short-container-title:J. Microelectromech. Syst.

Author:

Suzuki Y.S.,Tai Y.-C.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/36040/01707796.pdf?arnumber=1707796

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