Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall Profiles
Author:
Affiliation:
1. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, South Korea
Funder
National Research Foundation of Korea
Korean Government
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9745978/09675141.pdf?arnumber=9675141
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