1. Department of Electrical Engineering and Information Systems, The University of Tokyo (UTokyo), Tokyo, Japan
2. Institute of Space and Astronautical Science (ISAS), Japan Aerospace Exploration Agency (JAXA), Chuo-ku, Sagamihara, Kanagawa, Japan
3. Central Research Institute of Electric Power Industry, Yokosuka, Kanagawa, Japan
4. Laboratory for Integrated Micro Mechatronic Systems (LIMMS), National Center for Scientific Research (CNRS), UTokyo, Tokyo, Japan
5. Department of Precision Machinery Engineering, Nihon University, Chiba, Japan