Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation

Author:

Park Kidong,Kim Namjung,Morisette Dallas T.,Aluru N. R.,Bashir Rashid

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Cited by 57 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. One-to-two internal resonance in a micro-mechanical resonator with strong Duffing nonlinearity;Journal of Micromechanics and Microengineering;2023-12-11

2. Dynamics of a Piezoelectric Mems Gas Sensor Based on Coupled Micromachined Resonators;2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2023-12-11

3. Chemical Classification by Monitoring Liquid Evaporation Using Extrinsic Fabry-Perot Interferometer With Microwave Photonics;Journal of Lightwave Technology;2023-12-01

4. Design and simulation of a resonance-based MEMS viscosity sensor;Journal of Computational Electronics;2023-11-16

5. Gas Sensor Based on Nonlinear Coupled AlN-Piezoelectric Micromachined Resonators;2023 IEEE SENSORS;2023-10-29

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