SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO3/SiC Bonded Wafers

Author:

Shen Junyao1ORCID,Fu Sulei1ORCID,Su Rongxuan1,Xu Huiping1,Lu Zengtian2,Zhang Qiaozhen3,Zeng Fei1ORCID,Song Cheng1,Wang Weibiao2,Pan Feng1ORCID

Affiliation:

1. Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing, China

2. Shoulder Electronics Ltd., Wuxi, China

3. School of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Special Project for Research and Development in Key areas of Guangdong Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

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1. Automated Electro-Thermal Model of Surface Acoustic Wave Filters;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

2. High-Performance Wideband SAW Filters on LNOI Platform;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

3. Non-Zero Power Flow Angles in Surface Acoustic Wave Resonators for Transverse Mode Suppression;IEEE Electron Device Letters;2024-05

4. Measurement of Thermal Field Temperature Distribution Inside Reaction Chamber for Epitaxial Growth of Silicon Carbide Layer;Journal of Manufacturing Science and Engineering;2024-04-22

5. Higher Order Mode Elimination for SAW Resonators Based on LiNbO₃/SiO₂/poly-Si/Si Substrate by Si Orientation Optimization;Journal of Microelectromechanical Systems;2024-04

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