1. Chinese Academy of Sciences Shenzhen, China,School of Mechanical and Electrical Engineering, Central South University, Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology,Changsha,China
2. WuYi University Shenzhen, China,Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences,Department of Intelligent Manufacturing,Jiangmen,China
3. Chinese Academy of Sciences,Shenzhen Institute of Advanced Electronic Materials Shenzhen Institute of Advanced Technology,Shenzhen,China
4. Central South University,School of Mechanical and Electrical Engineering,Changsha,China