Analysis of the effects of thermo-mechanical stress on the frequency shift of MEMS resonators-Reference-Cited by-同舟云学术

Analysis of the effects of thermo-mechanical stress on the frequency shift of MEMS resonators

Published:2022-08-10 Issue: Volume: Page:
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Container-title:2022 23rd International Conference on Electronic Packaging Technology (ICEPT)
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Author:

Xiaorui Bie¹,Xudong Zou¹,Xingyin Xiong¹,Zheng Wang²,Wuhao Yang¹,Zhitian Li¹

Affiliation:

1. Aerospace Information Research, Institute of Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Beijing,China

2. Qi Lu Aerospace Information Research Institute,Micro/Nano Optoelectronic Integrated System Division,Jinan,China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9872527/9872536/09873218.pdf?arnumber=9873218

Reference12 articles.

1. Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators

2. Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature

3. Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS Structures

4. Stiffness-compensated Temperature-insensitive Micromechanical Resonators;hsu;Technical Digest MEMS 2002 IEEE International Conference Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat No 02CH37266),2002

5. Robust Optimization of a MEMS Accelerometer Considering Temperature Variations

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