Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation

Author:

Xi Jingqian1ORCID,Zheng Zhuoyue2ORCID,Liu Huafeng1ORCID,Zhang Pan3ORCID,Zhao Chun4ORCID,Wang Yuan2ORCID,Wang Chen4ORCID,Kraft Michael5ORCID,Martins Rui P.2ORCID,Mak Pui-In2ORCID

Affiliation:

1. MOE Key Laboratory of Fundamental Physical Quantities Measurement, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, China

2. Institute of Microelectronics, University of Macau, Zhuhai, China

3. National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Peking University, Beijing, China

4. School of Physics, Engineering and Technology, University of York, York, U.K.

5. Department of Electrical Engineering-MNS, University of Leuven, Leuven, Belgium

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

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