Small Photoresist Defect Samples Augmentation Based on Generative Adversarial Network
Author:
Affiliation:
1. Chinese Academy of Sciences,State Key Laboratory of Robotics, Shenyang Institute of Automation,Shenyang,China,110016
2. Chinese Academy of Sciences,Institutes for Robotics and Intelligent Manufacturing,Shenyang,China,110169
Funder
Technology Development
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10081934/10081946/10082214.pdf?arnumber=10082214
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