Author:
Saint-Patrice D.,Pornin J. L.,Savornin B.,Rodriguez G.,Danthon S.,Fanget S.
Cited by
2 articles.
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1. Three-dimensional integration of MEMS;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. 3D Integration of MEMS;Handbook of Silicon Based MEMS Materials and Technologies;2015