Challenges and improvements for 3D-IC integration using ultra thin (25μm) devices

Author:

Manna A. La,Buisson T.,Detalle M.,Rebibis K. J.,Velenis D.,Zhang W.,Beyne E.

Publisher

IEEE

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Observation of Thermal Expansion Behavior of Nanotwinned-Cu/SiO2 & Regular-Cu/SiO2 Hybrid Structure via In-Situ Heating AFM;2024 IEEE 74th Electronic Components and Technology Conference (ECTC);2024-05-28

2. On the optimization of molding warpage for wafer-level glass interposer packaging;Journal of Materials Science: Materials in Electronics;2023-04

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4. Investigation into thermo-mechanical reliability of copper trace lines in stacked dies ball grid array packaging;Microelectronics Reliability;2022-03

5. A review of laser ablation and dicing of Si wafers;Precision Engineering;2022-01

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