Author:
Fenouillet-Beranger C.,Batude P.,Brunet L.,Mazzocchi V.,Lu C-M. V.,Deprat F.,Micout J.,Samson M-P.,Previtali B.,Besombes P.,Rambal N.,Andrieu F.,Billoint O.,Brocard M.,Thuries S.,Cibrario G.,Vinet M.
Cited by
2 articles.
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1. 半导体集成电路制造中的准分子激光退火研究进展;Infrared and Laser Engineering;2023
2. IC Technologies and Systems for Green Future;2022 China Semiconductor Technology International Conference (CSTIC);2022-06-20