Temperature compensation of a capacitive MEMS accelerometer by using a MEMS oscillator-Reference-Cited by-同舟云学术

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Temperature compensation of a capacitive MEMS accelerometer by using a MEMS oscillator

Published:2016-02 Issue: Volume: Page:
ISSN:
Container-title:2016 IEEE International Symposium on Inertial Sensors and Systems
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Author:

Kose Talha,Azgin Kivanc,Akin Tayfun

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/7431334/7435525/7435538.pdf?arnumber=7435538

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Temperature Compensation Approach for Micro-Electro-Mechanical Systems Accelerometer Based on Gated Recurrent Unit–Attention and Robust Local Mean Decomposition–Sample Entropy–Time-Frequency Peak Filtering;Micromachines;2024-03-30

2. A self-centering and stiffness-controlled MEMS accelerometer;Microsystems & Nanoengineering;2024-01-18

3. Optimal design of the stress-buffering structure in MEMS resonant accelerometer package;2023 24th International Conference on Electronic Packaging Technology (ICEPT);2023-08-08

4. Temperature Bias Drift Phase-Based Compensation for a MEMS Accelerometer with Stiffness-Tuning Double-Sided Parallel Plate Capacitors;Nanomanufacturing and Metrology;2023-06-15

5. Thermal Calibration of Triaxial Accelerometer for Tilt Measurement;Sensors;2023-02-13

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