DC and RF characteristics of advanced MIM capacitors for MMIC's using ultra-thin remote-PECVD Si/sub 3/N/sub 4/ dielectric layers-Reference-Cited by-同舟云学术

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DC and RF characteristics of advanced MIM capacitors for MMIC's using ultra-thin remote-PECVD Si/sub 3/N/sub 4/ dielectric layers

Published:1999 Issue:9 Volume:9 Page:345-347
ISSN:1051-8207
Container-title:IEEE Microwave and Guided Wave Letters
language:
Short-container-title:IEEE Microw. Guid. Wave Lett.

Author:

Jae-Hak Lee ,Dae-Hyun Kim ,Yong-Soon Park ,Myoung-Kyu Sohn ,Kwang-Seok Seo

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

General Physics and Astronomy,General Engineering

Link

http://xplorestaging.ieee.org/ielx5/75/17163/00790469.pdf?arnumber=790469

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5. Impact of Design on High-Frequency Performance of Advanced MIM Capacitors Using Si$_{3}$N$_{4}$ Dielectric Layers;IEEE Transactions on Components and Packaging Technologies;2008-09

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