Tracking in-die mechanical stress through silicon embedded sensors for advanced packaging applications
Author:
Affiliation:
1. PDF Solutions Inc.,Santa Clara,CA,USA,95050
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9816066/9816372/09816606.pdf?arnumber=9816606
Reference7 articles.
1. Aging of the Molding Compound Identification using Piezoresistive Silicon Based Stress Sensor
2. $In\ Situ$ Failure Detection of Electronic Control Units Using Piezoresistive Stress Sensor
3. Package induced stress impact on transistor performance for ultra-thin SoC
4. Single Chip and Multi-Chip Integartion;Heterogeneous Integration Roadmap,2021
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Monitoring of wafer thinning induced in-die mechanical stress with embedded sensors for heterogeneous integration;2024 IEEE 74th Electronic Components and Technology Conference (ECTC);2024-05-28
2. In-Product BTI Aging Sensor for Reliability Screening and Early Detection of Material at Risk;2023 IEEE International Reliability Physics Symposium (IRPS);2023-03
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