Author:
Hickernell F.J.,Yue R.-X.,Hickernell F.S.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation
Cited by
12 articles.
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1. Piezoelectric MEMS: Materials and Devices;Piezoelectric and Acoustic Materials for Transducer Applications;2008
2. Electrical Properties;Materials Science in Microelectronics II;2006
3. Characterization of polycrystalline AlN films using variable-angle spectroscopic ellipsometry;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2005-07
4. Bandpass filters for 8 GHz using solidly mounted bulk acoustic wave resonators;IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control;2005-06
5. Thin Film Piezoelectrics for MEMS;Electroceramic-Based MEMS;2005