In-Plane-Sensing Analysis of Comb-Like Capacitive Micro-Machined Ultrasonic Transducers (CMUTs) Using Analytical Small-Signal Model and FEM-Reference-Cited by-同舟云学术

In-Plane-Sensing Analysis of Comb-Like Capacitive Micro-Machined Ultrasonic Transducers (CMUTs) Using Analytical Small-Signal Model and FEM

Author:

Zhang Sai¹^ORCID,Lu Wei¹^ORCID,Yang Yuhua²,Wang Renxing²^ORCID,Zhang Guojun²^ORCID,Xu Baiqiang¹,Yilmaz Mehmet³^ORCID,Zhang Wendong²^ORCID

Affiliation:

1. Institute of Ultrasonic Testing, Jiangsu University, Zhenjiang, China

2. State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan, China

3. Institute of Materials Science and Nanotechnology and the UNAM-National Nanotechnology Research Center, Bilkent University, Ankara, Turkey

Funder

National Natural Science Foundation of China

National Major Scientific Instrument Research Project of NSFC

Foundation of State Key Laboratory of Dynamic Testing Technology

State Key Laboratory of Marine Environmental Science (MEL) Visiting Fellowship of Xiamen University

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

Reference52 articles.

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