Affiliation:
1. Department of Mechanical System Engineering, Tokyo University of Agriculture and Technology, Tokyo, Japan
2. Department of Industrial Technology and Innovation, Tokyo University of Agriculture and Technology, Tokyo, Japan
Funder
Japan Society for the Promotion of Science (JSPS) KAKENHI
Precise Measurement Technology Promotion Foundation
Takeda Sentanchi Supercleanroom, University of Tokyo, through the “Nanotechnology Platform Program” of the Ministry of Education, Culture, Sports, Science, and Technology (MEXT), Japan
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Cited by
11 articles.
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