A Thin-Film Piezoelectric-on-Silicon MEMS Oscillator for Mass Sensing Applications
Author:
Funder
Ministry of Science and Technology
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/9108319/09027921.pdf?arnumber=9027921
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