A 7.25 <i>μ</i> K Ultrahigh Resolution MEMS Resonant Thermometer-Reference-Cited by-同舟云学术

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A 7.25 μ K Ultrahigh Resolution MEMS Resonant Thermometer

Published:2024-04-15 Issue:8 Volume:24 Page:12161-12168
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Wang Zheng¹^ORCID,Ma Liangbo²^ORCID,Bie Xiaorui²,Xiong Xingyin²,Zhai Zhaoyang²,Yang Wuhao²^ORCID,Lu Yongjian¹,Zou Xudong¹^ORCID

Affiliation:

1. Shandong Key Laboratory of Low-Altitude Airspace Surveillance Network Technology, QiLu Aerospace Information Research Institute, Jinan, China

2. State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, China

Funder

National Key Research and Development Program of China

Key Research Program of Frontier Science, Chinese Academy of Sciences

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/7361/10500449/10460450.pdf?arnumber=10460450

Reference43 articles.

1. Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing

2. SOI CMOS multi-sensors MEMS chip for aerospace applications

3. An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications

4. Embedded Micro Inertial Navigation System

5. Use of MEMS accelerometers/inclinometers as a geotechnical monitoring method for ground subsidence

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