Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing-Reference-Cited by-同舟云学术

Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing

Published:2013-10 Issue: Volume:201 Page:517-524
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Prikhodko Igor P.,Trusov Alexander A.,Shkel Andrei M.

Funder

ONR/NSWCDD

DARPA/SPAWAR

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Multi-DOF inertial MEMS: from gaming to dead reckoning;Ayazi,2011

2. Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor;Prikhodko,2011

3. North-finding with 0.004 radian precision using a silicon MEMS quadruple mass gyroscope with Q-factor of 1 million;Prikhodko,2012

4. Error sources in in-plane silicon tuning-fork MEMS gyroscopes;Weinberg;IEEE Journal of Microelectromechanical Systems,2006

5. MEMS enables oscillators with sub-ppm frequency stability and sub-ps jitter;Melamud,2012

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