Effect of Oxygen Precursors on Growth Mechanism in High-Quality β-Ga₂O₃ Epilayers on Sapphire by Molecular Beam Epitaxy and Related Solar-Blind Photodetectors
Author:
Affiliation:
1. Department of Microelectronics and Integrated Circuit, School of Electronic Science and Engineering (National Model Microelectronics College), Xiamen University, Xiamen, China
Funder
National Natural Science Foundation of China
Fujian Minjiang Distinguished Scholar Program and Xiamen Double-Hundred-Talent Program
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/7361/10516472/10472425.pdf?arnumber=10472425
Reference52 articles.
1. Ultrawide-bandgap semiconductors: An overview
2. 2.5 kV Vertical Ga2O3 Schottky Rectifier With Graded Junction Termination Extension
3. Ultra-wide bandgap semiconductor Ga2O3 power diodes
4. A Strategic Review on Gallium Oxide Based Deep‐Ultraviolet Photodetectors: Recent Progress and Future Prospects
5. Recent Progress of Deep Ultraviolet Photodetectors using Amorphous Gallium Oxide Thin Films
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1. Epitaxial Growth of Ga2O3: A Review;Materials;2024-08-28
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