Microheater Material Selection Framework for Micro-Electromechanical System (MEMS)-Based Gas Sensor
Author:
Affiliation:
1. Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science (BITS) at Pilani, Pilani, Rajasthan, India
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10316685/10268346.pdf?arnumber=10268346
Reference32 articles.
1. Development of a Reliable Micro-Hotplate With Low Power Consumption
2. A Performance-Enhanced Liquid Metal-Based Microheater with Parallel Ventilating Side-Channels
3. Molybdenum Microheaters for MEMS-Based Gas Sensor Applications: Fabrication, Electro-Thermo-Mechanical and Response Characterization
4. Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus
5. Integration of Tungsten Micro-Heaters and Polymer Microfluidic for the Cell Sorting Application
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