Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film-Reference-Cited by-同舟云学术

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Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Nakashima Rihachiro¹,Takahashi Hidetoshi¹

Affiliation:

1. Keio University,Japan

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699747.pdf?arnumber=9699747

Reference7 articles.

1. Tactile sensor array using microcantilever with nickel–chromium alloy thin film of low temperature coefficient of resistance and its application to slippage detection

2. Flexible tactile sensor for shear stress measurement using transferred sub-µm-thick Si piezoresistive cantilevers

3. Direct laser writing for creating porous graphitic structures and their use for flexible and highly sensitive sensor and sensor arrays

4. Laser-induced porous graphene films from commercial polymers

5. Laser-Induced Graphene Strain Sensors Produced by Ultraviolet Irradiation of Polyimide

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MEMS 6-axis force sensor chip for spike pins in athletic sports shoes;Sensors and Actuators A: Physical;2023-12

2. 6-Axis Force-Torque Sensor Utilizing Four Pairs of Standing Laser-Induced Graphene Cantilevers;2023 IEEE SENSORS;2023-10-29

3. Lig-Based Triaxial Tactile Sensor Utilizing Rotational Erection System;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

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