Flexible tactile sensor for shear stress measurement using transferred sub-µm-thick Si piezoresistive cantilevers-Reference-Cited by-同舟云学术

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Flexible tactile sensor for shear stress measurement using transferred sub-µm-thick Si piezoresistive cantilevers

Published:2012-10-08 Issue:11 Volume:22 Page:115025
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Noda Kentaro,Onoe Hiroaki,Iwase Eiji,Matsumoto Kiyoshi,Shimoyama Isao

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Transparent and flexible organic field-effect transistor for multi-modal sensing

2. Capacitive tactile sensor array for touch screen application

3. Flexible electronics sensors for tactile multiscanning

4. A Small and Low-Cost 3-D Tactile Sensor for a Wearable Force Plate

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4. Crystallographic Orientation Dependence in Creep Deformation of Micron-Thick Silicon Films for 3-D Microstructures;2024

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