1:6 Internal Resonance in CMOS-MEMS Multiple-Stepped CC-Beam Resonators
Author:
Affiliation:
1. Institute of Applied Mechanics, National Taiwan University,Taipei,Taiwan
Funder
Ministry of Science and Technology
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699842.pdf?arnumber=9699842
Reference10 articles.
1. Strong internal resonance in a nonlinear, asymmetric microbeam resonator
2. Frequency Combs: A New Mechanism for MEMS Vibration Energy Harvesters
3. A CMOS-MEMS clamped–clamped beam displacement amplifier for resonant switch applications
4. An internal resonance based frequency up-converting energy harvester
5. Two-to-one internal resonance in the higher-order modes of a MEMS beam: Experimental investigation and theoretical analysis via local stability theory
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4. A CMOS-MEMS Ultrasensitive Thermometer Using Internal Resonance Iuduced Frequency Combs;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
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