A High-Order Membrane Resonator Array For Gravimetric Ammonia Sensing with Sub-Ppm Limit of Detection-Reference-Cited by-同舟云学术

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A High-Order Membrane Resonator Array For Gravimetric Ammonia Sensing with Sub-Ppm Limit of Detection

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Liu Zhenming,Lotfi Ardalan,Shamami Mojtaba H.,Hesketh Peter J.,Ayazi Farrokh

Funder

National Science Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699741.pdf?arnumber=9699741

Reference10 articles.

1. Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

2. Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement

3. Distributed MEMS Mass-Sensor Based on Piezoelectric Resonant Micro-Cantilevers

4. Carboxyl functionalized gold nanoparticles in situ grown on reduced graphene oxide for micro-gravimetric ammonia sensing

5. Carbon monoxide (CO) optical gas sensor based on ZnO thin films

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1. Sensitive Membrane Resonator Sensor for Sub-Micron Diameter Particle Counting;2024 IEEE International Symposium on Olfaction and Electronic Nose (ISOEN);2024-05-12

2. A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

3. A High-Order Membrane Resonator as Density-Viscosity Sensor for Sweat Analysis;2023 IEEE BioSensors Conference (BioSensors);2023-07-30

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