Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement-Reference-Cited by-同舟云学术

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Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement

Published:2009-03-20 Issue:4 Volume:19 Page:045023
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Yu Haitao,Li Xinxin,Gan Xiaohua,Liu Yongjing,Liu Xiang,Xu Pengcheng,Li Jungang,Liu Min

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Environmental sensors based on micromachined cantilevers with integrated read-out

2. Adsorption–desorption characteristics of explosive vapors investigated with microcantilevers

3. Microfabrication techniques for chemical/biosensors

4. Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers

5. Microelectromechanical Resonator Characterization Using Noncontact Parametric Electrostatic Excitation and Probing

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